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How to simulate Squeeze Film Damping

Posted Apr 16, 2011, 2:52 p.m. EDT Version 4.0a 2 Replies

Alec Yovanovitch
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Hello,

I would like to use COMSOL to simulate the effects of squeeze film damping on an oscillating microcantilever in a closed body of fluid. Since the body is closed, the fluid displaced by the microcantilever as it moves down pushes on the top of the cantilever. Any ideas as to how I should go about this? What models to learn from, and what modules / settings I should use?

Thanks,
Alec
2 Replies Last Post Nov 21, 2016, 7:23 a.m. EST
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago Apr 16, 2011, 3:26 p.m. EDT
Hi

you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use

--
Good luck
Ivar
Hi you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use -- Good luck Ivar
Anand Upadhyay
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Posted: 7 years ago Nov 21, 2016, 7:23 a.m. EST

Hello Ivar,

As suggested we don't get model in model library for accelerator in version 5.0
Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer.

regards,
anand
Hello Ivar, As suggested we don't get model in model library for accelerator in version 5.0 Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer. regards, anand

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