E1 155[GPa] Young's modulus
nu1 0.23 Poisson's ratio
rho1 2330[kg/m^3] Density
sigma 50[MPa] Residual stress
epsilon sigma*(1-nu1)/E1 Residual strain
T1 605[degC] Deposition temperature
T0 25[degC] Room temperature
daT epsilon/(T1-T0) Coefficient of thermal expansion
thickness 2.25[um] Thickness