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Piezoresistive Elevator ButtonPiezoresistive Elevator Button

This example shows a model of a piezoresistive in-wall elevator button. It was designed with the following requirements in mind: durability with respect to high temperatures capability of producing signals that can be easily used in...

Thin Film BAW Composite ResonatorThin Film BAW Composite Resonator

Bulk Acoustic Wave (BAW) resonators can be used as narrow band filters in radio-frequency applications. The chief advantage compared with traditional ceramic electromagnetic resonators is that BAW resonators, thanks to the acoustic...

Computing Capacitance in a 3D Comb DriveComputing Capacitance in a 3D Comb Drive

Capacitive comb drives are commonly used both as actuators and position sensors. The following model focuses on position measurement. Many approaches exist for positional measurements with MEMS devices, of which capacitance measurement is...

Electroosmotic MicromixerElectroosmotic Micromixer

Microlaboratories for biochemical applications often require rapid mixing of different fluid streams. At the microscale, flow is usually highly ordered laminar flow, and the lack of turbulence makes diffusion the primary mechanism for...

Electroosmotic MicropumpElectroosmotic Micropump

Micropumps, especially those based on electroosmotic flow (EOF), are essential components in microfluidic lab-on-a-chip devices, as they contain no moving parts and are relatively easy to integrate in microfluidic circuits during...

Estimating the Q Factor of a MEMS GyroscopeEstimating the Q Factor of a MEMS Gyroscope

Slide-film damping is an important factor to consider when modeling structures with small gaps vibrating in the tangential direction. This effect is illustrated here in a model of a 2-DOF vibratory MEMS gyroscope. This model focuses on...

H-Micro CellH-Micro Cell

This example was originally formulated by Albert Witarsa under Professor Bruce Finlayson’s supervision at the University of Washington in Seattle. It was part of a graduate course in which the assignment consisted of evaluating the...

Residual Stress in a Thin-Film ResonatorResidual Stress in a Thin-Film Resonator

Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are...

Transport in an Electrokinetic ValveTransport in an Electrokinetic Valve

This model presents an example of pressure driven flow and electrophoresis in a 3D micro channel system. The model presents a study of a pinched injection cross valve during the focusing, injection, and separation stages. Focusing...

Capacitive Pressure SensorCapacitive Pressure Sensor

A common way to detect membrane deformation is by measuring capacitance. The surface of the deforming membrane and the opposite side of one of the cavities are coated with metal. Thus they form a capacitor whose value depends on the...


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