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MEMS Module

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Radially Polarized Piezoelectric TransducerRadially Polarized Piezoelectric Transducer

This tutorial model shows how a user-defined coordinate system can be used to create any type of directional polarization of a piezoelectric material. Results are shown for the case of radial polarization of a piezoelectric disk. The...

Squeeze-Film Gas Damping in an AccelerometerSqueeze-Film Gas Damping in an Accelerometer

Capacitively sensing micromechanical structures have typically a very narrow gap between the electrodes. The gap is usually filled with gas that damps the movements of the mechanical parts. This combined 3D and 2D model shows how...

Squeezed-Film Gas Damping in an AccelerometerSqueezed-Film Gas Damping in an Accelerometer

Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding...

Thermal ActuatorThermal Actuator

This tutorial model of a two-hot-arm thermal actuator couples three different physics phenomena: electric current conduction, heat conduction with heat generation, and structural stresses and strains due to thermal expansion. In this...

Thin Film ResistanceThin Film Resistance

In modeling of transport by diffusion or conduction in thin layers, we often encounter large differences in dimensions of the different subdomains in a model. If the modeled structure is a so-called sandwich structure, we can replace...

Tunable Piezoelectric ActuatorTunable Piezoelectric Actuator

A piezoelectric device can actuate a cantilever beam simply by applying an AC voltage over the device. The cantilever beam itself has resonant modes that cause peaks in the vibration when the frequency of the applied voltage passes the...

A Piezoelectric Shear Actuated BeamA Piezoelectric Shear Actuated Beam

This is example presents a static analysis of a piezoelectric actuator using the piezoelectric application mode from the Structural Mechanics Module (or the MEMS module). A sandwich beam consisting of three layers is modeled. The...

Composite Piezoelectric TransducerComposite Piezoelectric Transducer

This example shows how to set up a piezoelectric transducer problem following the work of Y. Kagawa and T. Yamabuchi. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer,...

Electroosmotic Flow in a BiochipElectroosmotic Flow in a Biochip

Miniature laboratories are required to efficiently analyze the information in human DNA. Such laboratories could facilitate tailor-made diagnoses and treatment of hereditary diseases for each individual. One problem that arises in...

Gecko FootGecko Foot

In nature, geckos use dry adhesion forces to climb walls. They have inspired researchers to develop synthetic gecko foot hairs to be used in, for example, robot applications. This model contains the nano/micro hierarchy of a synthetic...


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