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Prestressed Micromirror

Application ID: 372

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses.

The plating process can control this stress even for similar materials. One such device is the electrostatically controlled micromirror. It is typically quite small, and arrays of such devices can be implemented in projectors.

This section shows the fundamentals of how to set up and solve the lift-off of a prestressed plated devices. The model shows the use of the large deformation and initial stress features in the MEMS Module.

This application was built using the following:

MEMS Module