Analysis & Design Optimization of Laterally Driven PolySilicon Electro-thermal Microgripper for Micro-objects Manipulation
T. Pahwa, S. Gupta, V. Bansal, R. Narwal, B. Prasad, D. Kumar
Electronic Science Department, Kurukshetra University, Kurukshetra, India
Micro-grippers find applications in micro-robotics, microsurgery, micro-fluidics, micro-relays, assembling and miniature medical instrumentation. Actuation principle involved may be electrothermal, electrostatic, piezoelectric, shape memory and electromagnetic. It has been found that thermal actuation provides greater displacement at low voltages when compared to other mechanisms. A 3-D ...
VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
R. Komaragiri, Sarath. S., N. Kattabomman
NIT Calicut, Kozhikode, Kerala
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...
R. Pushpangadan, A. Soman, Arundas R., N. G. Thoppan, S. P. Duttagupta
Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, Maharashtra, India
College of Engineering, Munnar, Kerala, India
PEM fuel cells are very promising for portable applications. A key component of fuel cell is the flow field plate through which hydrogen will reach the anode, oxygen will reach the cathode and electron collection. Flow field plate made of silicon is not a good electrical conductor , so electrical contacts has to be attached to the Gas Diffusion Layer (GDL) for taking the power to outside ...
Effect of Conductivity and Viscosity in the Velocity Characteristics of a Fluid Flow Induced by Nonuniform AC Electric Field in Electrolytes on Microelectrodes
P. Parikh, A. Sethi, S. Benedict, D. N. Prasad, B. Mallik, S. Kapur, S. Deb, S. Banerjee
BITS Pilani Hyderabad Campus, Hyderabad, Andhra Pradesh, India
Megnadh Saha Institute of Technology, Kolkata, India
Electrokinetic transport of fluids has been investigated both experimentally and numerically due to its various applications in microfluidic devices [1-5]. These devices offer the advantage of transporting fluids or particles to specific locations without the aid of mechanical components. The device by Green et al consists of a symmetric arrangement of CPE subjected to an AC potential [6-8]. The ...
V. Tiwari, R. Sharma, G. Srivastava, R. Dwivedi
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Cantilever beam-type transducers have been in great demand and explored widely in the recent years, typically in thin film form because of their sensor and actuator applications. The piezoelectric cantilever is the most preferred structure employed in technological applications. Depending on the required flexural motion and sensitivities, these piezoelectric cantilevers can be used in unimorph, ...
Indian Institute of Technology Madras, Chennai, Tamil Nadu, India
Realising the interlinkage of nature and engineering are of paramount essential while comprehending the basics of system’s performances. Application of biotechniques in air pollution control is one such emerging scientific area, where the understandings of these complex systems demand more utilisation of computing softwares. Recently, biofiltration is a versatile biological air pollution control ...
IIT Kharagpur, Kharagpur, West Bengal, India
Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...
G. R. Prakash, K. M. V. Swamy, S. Huddar, B. G. Sheeparamatti, Kirankumar B. B.
Basaveshwar Engineering College, Bagalkot, Karnataka, India
The focus of this paper is to study the effect on resonance frequency and power enhancement techniques of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical relation was developed based on the shift in resonance frequency(Figure 2) caused by the addition of a thin film ...
S. Kesari, A. Pandit, K. Mishra, Kaushal B. K.
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, India
The MEMS microphone is also called microphone chip or silicon microphone.The pressure sensitive diaphragm is etched directly into a silicon chip by MEMS techniques and is usually accompanied with integrated preamplifier. Most MEMS microphones are variants of the condenser microphone design. The device consists of a polysilicon diaphragm suspended over a single crystal silicon backplate ...
L. Sujatha, B. Preethi
Rajalakshmi Engineering College, Chennai, India
MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG)  with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...