V. S. P. Rajesh ,
 St. Mary's Group of Institutions, Hyderabad, India
3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. ...
S. Dixit, R. C. Jain
Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India
Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...
G. Gomila , L. Fumagalli , R. Fabregas ,
 Institut de Bioenginyeria de Catalunya (IBEC), Departament d’Electrònica, Universitat de Barcelona, Barcelona, Spain
 School of Physics and Astronomy, University of Manchester, Manchester, United Kingdom
 Institut de Bioenginyeria de Catalunya (IBEC), Universitat de Barcelona, Barcelona, Spain
Electrical scanning probe microscopy (SPM) techniques, such as electrostatic force microscopy, nanoscale impedance microscopy or scanning near field microwave microscopy, are a relatively new branch of microscopy techniques that can generate images of the nanoscale electrical properties of samples (conductivity, permittivity, charge, etc.). These techniques scan the surface of a sample ...
A. Dwivedi , G. Khanna ,
 NIT Hamirpur, Hamirpur, Himachal Pradesh, India
This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. The analysis is done using COMSOL Multiphysics®. The maximum applied acceleration was considered 1g. Human temporal bones ...
N. J. Krishnapriya, M. R. Baiju
College of Engineering, Trivandrum, Kerala, India
In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The corrugation and perforation in diaphragm reduces the residual stress and increases the mechanical sensitivity of diaphragm. Instead of the perforated back plate, holes have been made on the diaphragm. Therefore, potassium hydroxide (KOH) etching can be ...
Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...
A. K. Namdeo , H. B. Nemade ,
 Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents a method of extraction of electrical equivalent circuit of a one port surface acoustic wave (SAW) resonator from the results of simulation based on finite element method (FEM) using COMSOL Multiphysics software. A one port SAW resonator consists of large number of periodic interdigital transducer (IDT) electrodes fabricated on the surface of a piezoelectric substrate. A ...
P. Graak , S. Kaur , A. Gupta , P. Chhabra , D. Kumar , A. Shetty 
 Kurukshetra University, Kurukshetra, Haryana, India
 Indian Institute of Science, Bengaluru, Karnataka, India
The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations converted to electrical energy by piezoelectric transducer due to their major significance. Various research journals have introduced the phenomenon of energy optimization to increase the generated power and used directly for application like ...
A. Arevalo , D. Conchouso , D. Castro , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...
Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor
V. S. Selvakumar, L. Sujatha
Rajalakhmi Engineering College, Chennai, Tamil Nadu, India
Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases . To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...