S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA
A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required. The measuring principle is detecting capacitance change according to the dielectric ...
F. Wittbrach, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Bielefeld University, Germany
It is possible to control the motion of magnetic beads using a combination of hydrodynamic and electromagnetic forces. In this work, we investigate the possibility to manipulate the motion of beads with different magnetic moments in a special microfluidic structure so as to separate them. We also experimentally prove that this structure is a suitable device to separate beads and show that ...
G. Soni, T. Squires, and C. Meinhart
Department of Mechanical Engineering, University of California Santa Barbara, CA, USA
 Department of Chemical Engineering, University of California Santa Barbara, CA, USA
We present a numerical model for simulating highly nonlinear electrokinetic phenomena, which occurs at high zeta potentials. In this model, the electric double layer is realized by solving a partial differential equation (PDE) on the double-layer-inducing surface. We also allow for a nonlinear surface capacitance, which relates the surface charge density to the zeta potential of the surface. With ...
V. S. Selvakumar, M. S. Gowtham, M. Saravanan, S. Suganthi, and L. Sujatha
Rajalakshmi Engineering College
Micro-tweezers have been widely investigated because of their extensive applications in micro-fluidics technology, microsurgery and tissue-engineering. It has been reported that thermal actuation provides greater forces and easier control when compared to electrostatic micro actuation. In this paper, we discuss about the effects of Alumina as gripper on the operation of micro tweezers. The ...
M. Ramya, R. P. S. Valli, R. Vidya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In this study, a biomimetic vibrating 3D MEMS Gyroscope is designed, consisting of two circular diaphragms with a club shaped structure placed over one of them. This MEMS based vibrating gyroscope was modeled and simulated using COMSOL Multiphysics 4.1 - MEMS module. The purpose of the research was to develop an effective gyroscope for guidance and control of mobile robots. The simulated ...
K. M. V. Swamy, B. G. Sheeparamatti, G. R. Prakash 
Department of Electronics and Communication, Basaveshwara Engineering College, Bagalkot, Karnataka, India
This study is performed to know which central plate geometry is best suited for electrostatically actuated switch. The simulation is carried out in COMSOL Multiphysics, where user is free to model the geometry without depth knowledge about geometrical dependency of electrostatic. The study of the centrally suspended geometrical models such as circle, square and rectangle suspended by two short ...
S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. Here ...
Dr. Piotr Kropelnicki
Mu Xiao Jing
Wan Chia Ang
Andrew B. Randles
Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore
In this research, we performed multiple COMSOL Multiphysics® simulations. We analyzed the dispersion curves of waves in a LAMB wave pressure sensor; simulated a thin metal film in a microbolometer and observed the resulting stress; investigated the thermal behavior of an acoustic wave microbolometer; and modeled the fluid-structure interaction (FSI) for piezoelectric-based energy harvesting from ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
F. Wittbracht, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the state of motion of the carrier liquid. Also no external magnetic gradient fields are employed; the total external magnetic force applied is therefore zero. The theoretical idea will be tested experimentally. Here, additional effects originating from ...