J. Yoo, H. Soh, J. Choi, S. Song
Department of Mechanical Engineering, Yonsei University, Korea
Hyundai Motor Co., Korea
Samsung Electronics Co., Ltd., Korea
Mando Co., Korea
Nanoscale structural analysis and design is presented. All the simulations are carried out using a finite element solver and optimization is performed using parameter and topology optimization schemes. It is concluded that COMSOL is effective for analysis and design of nanoscale structure design in electromagnetic field and it may be combined with several optimization methods to improve system ...
B.Bharanipriyaa, V.S.Selvakumar, L. Sujatha
 National MEMS Design Center, Rajalakshmi Engineering College, Thandalam, Chennai,Tamil Nadu, India
Micro Mirrors is a versatile device which has been gaining popularity and this finds application in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either positive or negative directions of x and y. The ends of thermal actuators are attached to the edges of the mirror. Thus when voltage is applied to the thermal ...
High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results
I.A. Ivan, M. Rakotondrabe, and N. Chaillet
FEMTO-ST Institute, University of Franche-Comte, Besançon, France
New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...
Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
Interfacing Continuum and Discrete Methods: Convective Diffusion of Microparticles and Chemical Species in Microsystems
CEA-LETI, Department of Biotechnology, Grenoble, France
Convective transport of macromolecules or micro and nanoparticles in microsystems are usually predicted by solving the Navier Stokes equations for the carrier fluid and a concentration equation for the diffusing species. In the case of isolated particles or complicated geometries with extremely small apertures or microporous material, the concentration equation maybe replaced by a Monte Carlo ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the ...
S. Takahashi, S. Ogata
Tokyo Metropolitan University Hachioji City, Tokyo, Japan
We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...
V. Jain, A. K. Sharma, P. Kumar
Thapar University, Patiala, Punjab, India
Indian Institute of Technology Roorkee, Roorkee, Uttar Pradesh, India
The greatest challenge being faced for realization of Micro-Electro Mechanical System (MEMS) technology is the lack of a simple, quick and reliable method for the fabrication of 3-D microchannel in the range of micrometers. A novel fabrication technique which opens possibilities for the production of these microfluidic channels is presented in this paper. The present paper highlights the ...
H-Y. Shen, H-P. Tsui, J-C .Hung, S-Y. Lin, and B-H. Yan
Metal Industries Research and Development Centre, Taichung, Taiwan
National Central University, Chungli, Taiwan
In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...