Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
崔海航 , 王雷磊 , 谭晓君 ,
Janus 颗粒是由物理或化学性质不同的两部分所构成的颗粒的总称。由于其结构的特殊性以及自驱动特性使其在MEMS、药物传输等领域有着潜在的应用价值。本文基于COMSOL Mutiphysics® 4.3a 多物理场耦合模拟平台对不同形状的 Pt-SiO2 型 Janus 颗粒的在不同浓度 H2O2 溶液中的自扩散泳动进行了数值模拟，并进一步研究模拟了球形 Janus 颗粒的近壁面运动。
F. Lai , N. K. Shivaprakash , J. Zhang , A. Panwar , J. Mead , C. Barry , Q. Truong ,
 University of Massachusetts Lowell, Lowell, MA, USA
 US Army Natick Soldier Research, Development and Engineering Center, Natick, MA, USA
Micro hot embossing on a large area polymeric substrates using roll-to-roll (R2R) mode has been considered as one of the most promising technologies that can offer continuous fabrication of large area polymeric substrates. Besides continuous operation, roll-to-roll (R2R) process offers advantages such as low forming load and higher replication accuracy. Consequently, R2R embossed polymeric ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
P. Prema, Sakthivishnu.R, Sowmya. R, Chandra Devi K, Meenakshi Sundaram. N
PSG College of Technology, Coimbatore, Tamil Nadu, India
An artificial hand is the one that replaces the hand lost through trauma, disease, or congenital conditions. The proposed design is to simulate a sensor, used in prosthetic hand so as to measure the pressure required to hold the object, using COMSOL Multiphysics®. The physical parameters such as size, shape and mass of the object were optimized so as to hold an object. The weight of the object ...
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics®. We apply our model to magnetoresistive sensors consisting of several soft ferromagnetic layers and their response to magnetic particles. The magnetization dynamic of the particles needs to be described in a similar manner, though due to size ...
J. Schumacher, P. Fideu, G. Ziegmann, and A. Herrmann
TU Clausthal-Institute of Polymere Materials and Plastic Engineering, Clausthal-Zellerfeld, Germany
CTC GmbH Stade, Stade, Germany
Faserinstitut Bremen e.V., Bremen, Germany
The current paper focuses on the creation of a consistent environment for the numerical prediction of the physical properties of polymer composite. A limitation factor for the successful simulation of composite processes is the correct estimation of the effective properties depending on several factors such as the constituents (fiber, polymer), the process setup. The numerical prediction of the ...
H-Y. Shen, H-P. Tsui, J-C .Hung, S-Y. Lin, and B-H. Yan
Metal Industries Research and Development Centre, Taichung, Taiwan
National Central University, Chungli, Taiwan
In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...
Huazhong University of Science and Technology, Wuhan, China
High magnetic field research has yielded fruitful results. Since 1913, associated with the magnetic field there are 19 Nobel Prizes, including a prize for medicine, five chemistry prizes, and 13 physics prizes. In recent years, the international community under the conditions of strong magnetic field is very active in scientific research, involving many disciplines such as physics, chemistry, ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.