3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler fabrication ...
The Effects of the Electrical Double Layer on Giant Ionic Currents through Single Walled Carbon Nanotubes
G. Zhang[,][,], S.L. Bearden 
Department of Bioengineering, Clemson University, Clemson, SC, USA
Department of Electrical and Computer Engineering, Clemson University, Clemson, SC, USA
Institute for Biological Interfaces of Engineering, Clemson University, Clemson, SC, USA
Electrofluidic transport through a single walled carbon nanotube (SWCNT) is enhanced by electroosmosis. Electroosmosis is made possible in these devices by the combination of a large slip length within SWCNTs and the interfacial potential at the solution/nanotube interface. A computational model of a SWCNT device was developed using COMSOL Multiphysics to investigate the complete electrical ...
IIT Kharagpur, Kharagpur, West Bengal, India
Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...
V. S. Nagaraja, Ramanuja H. S., Deepak K, S. L. Pinjare
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India
In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results
I.A. Ivan, M. Rakotondrabe, and N. Chaillet
FEMTO-ST Institute, University of Franche-Comte, Besançon, France
New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...
M. Pribyl, and D. Snita
Department of Chemical Engineering, Institute of Chemical Technology, Prague
Two mathematical models of the electrokinetic flow are presented where the electroosmotic flow is induced by the interaction of a surface electric charge with a perpendicularly imposed electric field. In order to solve such problems, an anisotropic mesh of rectangular finite elements is developed. Stationary distributions of the model variables are computed for various sets of model ...
University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
L. Sujatha, D. K. Balasubramanian, V. S. Selvakumar
Rajalakshmi Engineering College, Chennai, India
University of Central Florida, Orlando, Florida, United States
Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors find applications in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either vertical or horizontal directions for the given orientation. The ends of thermal actuators ...