Here you will find presentations given at COMSOL Conferences around the globe. The presentations explore the innovative research and products designed by your peers using COMSOL Multiphysics. Research topics span a wide array of industries and application areas, including the electrical, mechanical, fluid, and chemical disciplines. Use the Quick Search to find presentations pertaining to your application area.

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...

A MEMS Condenser Microphone for Consumer Applications

S. L. Pinjare, V. S. Nagaraj, S. N. Savitha, S. Kesari, M. S. Sagar, and K. R. Roshan
Nitte Meenakshi Institute of Technology

The MEMS microphone is also called microphone chip or silicon microphone. The pressure sensitive diaphragm is etched directly into a silicon chip by MEMS techniques and is usually accompanied with integrated preamplifier. Most MEMS microphones are variants of the condenser microphone design. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone ...

MEMS Based Silicon Load Cell for Weighing Applications

D. Chauhan[1], B. D. Pant[2]
[1]Kurukshetra University, Kurukshetra, Haryana, India
[2]CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two different load cell designs were simulated. First design is based on compressing a meander like polysilicon strain gage for the measurement of high forces up to 10kN. Second design is based on MEMS pressure sensor consisting of membrane, on which ...

CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya [1], B. D. Pant [2],
[1] Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
[2] CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...

Simulations of MEMS Based Piezoresistive Accelerometer Designs in COMSOL

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Taiwan, (R.O.C)
[2]National Tsing Hua University, Taiwan, (R.O.C)

Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends ...

Design and Simulation of 3D MEMS Piezoelectric Gyroscope using COMSOL Multiphysics®

T.Madhuranath[1], R.Praharsha[1], Dr.K.Srinivasa Rao[1]
[1]Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an important problem in engineering. This can be addressed by Gyroscopes. These sensors are used to find orientation and angular velocity. This paper focuses on 3D MEMS Piezoelectric Gyroscope. COMSOL Multiphysics® is used for designing and ...

Nanoscale Heat Transfer using Phonon Boltzmann Transport Equation

S. Sihn[1,2], and A.K. Roy[2]

[1]Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
[2]University of Dayton Research Institute, Dayton, Ohio, USA

COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat transport problems. One dimensional steady-state and transient BTE problems were successfully solved based on finite element and discrete ordinate methods for spatial and angular discretizations, respectively, by utilizing the built-in feature of the COMSOL, Coefficient Form of PDE.

Design and Simulation of MEMS Micro Heater for DNA Amplification

D. Sharma [1], A. Siddiqua [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

PCR (Polymerase Chain Reaction) is a recent well researched technique which can be employed to obtain an amplified DNA (Deoxyribonucleic Acid). A continuous flow polymerase chain reaction with integrated MEMS based design micro heater for DNA amplification is implemented. Temperature zone is obtained by natural heat conduction rather than making use of typical silicon thermal cycler. Inter ...

Design, Simulation and Optimization of Bimorph Piezoelectric Energy Harvester

T. Desai [1], R. Dudhe [1], S. Ayyalusamy [1],
[1] Manipal University, Dubai, UAE

Piezoelectric energy conversion has received great attention for vibration-to-electric energy conversion over the last five years. A typical piezoelectric energy harvester is a unimorph or a bimorph cantilever located on a vibrating host structure, to generate electrical energy from base excitations. In this paper we have optimized the dimensions of the proof mass and the bimorph piezoelectric ...